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What is the Magnetron Sputtering Power Supply?
Publisher£ºadmin¡¡Time£º2012/8/15¡¡ Read£º1780

With the constant development of science and technology, the magnetron sputtering technology also develops rapidly, but in the process of magnetron sputtering, the key part is pulsed magnetron sputtering power supply. At present, the pulse magnetron sputtering power supply to the development direction of high power and high frequency, due to the high frequency of switch power supply, increased the power loss of switch. So, our company adopts the technology of phase shifting soft switch to design and manufacture the high power pulsed magnetron sputtering power supply, it greatly reduced the switching loss of power supply and improved the power supply efficiency. By using the method of point set of output power protection, it makes the output adjusted freely, and realized the rapid response of over-current protection.Efficient and perfect protection measures ensured the energy long-term and reliable operation, the power control uses digital design, to realize the power supply set arbitrarily of the output pulse voltage, pulse cycle time and pulse frequency, as well as a variety of process parameters, with functions of on-line programmable.

The power supply adopts technique of pulse unit superimposition, puts the 5 groups of Independent unit modules together in a series connection, and adopts the synchronous drive technology to realize the 5KV high-voltage pulse output. It can increase or decrease the number of pulse units to meet the needs of different output voltage and realize the modular design.

The performance index of this power supply: Pulse voltage amplitude: 500V~5KV; pulse frequency: 500Hz~50kHz; pulse duty factor: 5%~90%; pulse current amplitude: 10~200A; pulse power: 5~50kw.

 
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